This website uses cookies primarily for visitor analytics. Certain pages will ask you to fill in contact details to receive additional information. On these pages you have the option of having the site log your details for future visits. Indicating you want the site to remember your details will place a cookie on your device. To view our full cookie policy, please click here. You can also view it at any time by going to our Contact Us page.

White papers

Trench Etched Resonant Pressure Sensor: TERPS

This paper presents a MEMS Resonant Pressure Transducer that is produced using a flexible fabrication route to allow pressure ranges from 1bar to 700bar in fully oil isolated hermetic packages without compromising sensor performance. Data showing long-term stability of better than 100ppm drift per year are presented. This paper discusses a new silicon based transducer design that can be packaged for use in a harsh environment in a small form factor.

Company: GE Measurement & Control, Category: White Papers

Please fill in details requested below and the paper selected will be delivered instantly in full.

(*) First name :  
(*) Last name :  
(*) Job title :  
(*) Company name :  
(*) E-mail address :  
(*) Telephone :  
Fax : 
Address : 
Postcode : 
Country :