All-in-one vapour delivery solution
04 November 2014
Bronkhorst High-Tech, a manufacturer of mass flow meters and controllers for gases and liquids, has designed a new series of vapour delivery modules.
The compact sub-systems incorporate a Coriolis-based liquid flow controller, one or two mass flow controllers for carrier gas and a temperature controlled mixing and evaporation device. The modules are also equipped with an 1.8in TFT display and push-buttons for local readout and control.
The systems can be operated via digital communication, if required. Optionally, they can be supplied with an additional mass flow controller for dilution and with local or remote trace heating temperature control.
The compact, ‘plug and work’ modules can generate saturated vapour flows within the range of 100 sccm up to 10 SLM. The applied Controlled Evaporation Mixing (CEM) technology is suited for atmospheric or vacuum processes and is capable of evaporating mixtures and even solids, dissolved in solvents.
The VDM-series vapourizers are said to be suited to use in vapour deposition and coating processes for the production of semiconductor chips, displays and solar cells.